Axcelis Technologies Inc (ACLS): Free Cash Flow

Operating cash flow minus capital expenditures for the same annual period and currency, computed by TickerFacts from the filed figures. A simple proxy, not a reported figure; a year without both inputs is left out.

$107.01M

Year ended 2025-12-31

$65.55M

Trailing 12 months to 2026-06-30

-19.5%

3-year compound annual growth

+11.4%

5-year compound annual growth

+20.6%

10-year compound annual growth

2015-12-31 Free Cash Flow (USD) 2025-12-31

Period ended	Free Cash Flow	Change YoY	Source filing
2025-12-31	$107.01M	-16.8%	2026-02-26, From 2025-01-01
2024-12-31	$128.64M	-5.6%	2026-02-26, From 2024-01-01
2023-12-31	$136.21M	-33.5%	2026-02-26, From 2023-01-01
2022-12-31	$204.92M	+44.9%	2025-02-28, From 2022-01-01
2021-12-31	$141.47M	+127.2%	2024-02-28, From 2021-01-01
2020-12-31	$62.27M	n/m	2023-02-24, From 2020-01-01
2019-12-31	-$25.56M	n/m	2022-02-25, From 2019-01-01
2018-12-31	$42.25M	-13.8%	2021-02-26, From 2018-01-01
2017-12-31	$49.00M	n/m	2020-03-02, From 2017-01-01
2016-12-31	-$11.29M	n/m	2019-03-11, From 2016-01-01
2015-12-31	$16.44M	n/a	2018-03-14, From 2015-01-01

Free Cash Flow at similar companies

Companies with the same SEC industry code (Special Industry Machinery, NEC), reporting in the same currency, closest in revenue. Each shows its own latest fiscal year, so period ends differ.

Company	Year ended	Free Cash Flow	Change YoY
Axcelis Technologies Inc (ACLS)	2025-12-31	$107.01M	-16.8%
ACM Research, Inc. (ACMR)	2025-12-31	-$66.61M	n/m
Veeco Instruments Inc (VECO)	2025-12-31	$53.29M	+16.6%
Azenta, Inc. (AZTA)	2025-09-30	$38.32M	+210.3%
Energy Recovery, Inc. (ERII)	2025-12-31	$17.44M	-9.3%
Amtech Systems Inc (ASYS)	2025-09-30	$6.93M	+39.5%
Trio-Tech International (TRT)	2026-06-30	$1.69M	n/m
Velo3D, Inc. (VELO)	2025-12-31	-$30.04M	n/m
Lam Research Corp (LRCX)	2026-06-28	$4.89B	-9.7%

Compare ACLS, ACMR, VECO, AZTA side by side · Screen every company in Special Industry Machinery, NEC ↗